Fundamental Principles of Optical Lithography: The Science of Microfabrication (Book Summary)


Fundamental Principles of Optical Lithography: The Science of Microfabrication (Book Summary)

  • Author: Chris Mack
  • Publisher: Wiley (December 17, 2007)
  • Genre: Engineering & Transportation, Engineering
  • ISBN: 978-0470727300
  • Dimensions: 6.69 x 1.22 x 9.61 inches